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나노 압입 실험을 통한 실리콘 모재 위의 알루미늄 박막의 물성 측정

Title
나노 압입 실험을 통한 실리콘 모재 위의 알루미늄 박막의 물성 측정
Authors
박현철
POSTECH Authors
박현철
Date Issued
2-Nov-2007
Publisher
한국복합재료학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/55630
Article Type
Conference
Citation
한국복합재료학회 추계학술대회, page. 126 - 129, 2007-11-02
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박현철PARK, HYUN CHUL
엔지니어링 대학원
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