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Mechanical properties measurement of siliconnitride thin films using the bulge test

Title
Mechanical properties measurement of siliconnitride thin films using the bulge test
Authors
박현철
POSTECH Authors
박현철
Date Issued
5-Dec-2007
Publisher
SPIE
URI
http://oasis.postech.ac.kr/handle/2014.oak/55628
Article Type
Conference
Citation
SPIE Microelectronics, MEMS and Nanotechnology, 2007-12-05
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박현철PARK, HYUN CHUL
엔지니어링 대학원
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