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Mechanical properties measurement of siliconnitride thin films using the bulge test
- Title
- Mechanical properties measurement of siliconnitride thin films using the bulge test
- Authors
- 박현철
- POSTECH Authors
- 박현철
- Date Issued
- 5-Dec-2007
- Publisher
- SPIE
- Article Type
- Conference
- Citation
- SPIE Microelectronics, MEMS and Nanotechnology, 2007-12-05
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