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양극 산화 알루미늄을 이용한 capacitive 습도 센서의 설계 및 성능 평가

Title
양극 산화 알루미늄을 이용한 capacitive 습도 센서의 설계 및 성능 평가
Authors
박현철이건홍
POSTECH Authors
박현철이건홍
Date Issued
4-Apr-2008
Publisher
한국 MEMS 학술대회 운영위원회
URI
http://oasis.postech.ac.kr/handle/2014.oak/55303
Article Type
Conference
Citation
제10 한국 MEMS 학술대회, page. 215 - 216, 2008-04-04
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이건홍LEE, KUN HONG
Dept. of Chemical Enginrg
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