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Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater

Title
Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater
Authors
박현철
POSTECH Authors
박현철
Date Issued
4-Jun-2008
Publisher
NSTI
URI
http://oasis.postech.ac.kr/handle/2014.oak/55278
Article Type
Conference
Citation
NSTI Nanotech 2008, page. 599 - 602, 2008-06-04
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박현철PARK, HYUN CHUL
엔지니어링 대학원
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