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Axially symmetric Multiple Mirror Optics for Soft X-ray Projection Microlithography

Title
Axially symmetric Multiple Mirror Optics for Soft X-ray Projection Microlithography
Authors
김동언
POSTECH Authors
김동언
Date Issued
1-Aug-1996
Publisher
Trends in Optics, A. Consortini, Ed.
URI
http://oasis.postech.ac.kr/handle/2014.oak/55157
Article Type
Conference
Citation
Trends in Optics, A. Consortini, Ed., page. 395, 1996-08-01
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