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Axially symmetric Multiple Mirror Optics for Soft X-ray Projection Microlithography
- Title
- Axially symmetric Multiple Mirror Optics for Soft X-ray Projection Microlithography
- Authors
- 김동언
- POSTECH Authors
- 김동언
- Date Issued
- 1-Aug-1996
- Publisher
- Trends in Optics, A. Consortini, Ed.
- Article Type
- Conference
- Citation
- Trends in Optics, A. Consortini, Ed., page. 395, 1996-08-01
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Related Researcher
- 김동언KIM, DONG EON
- Dept of Physics