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Design and fabarication of high sensitivity 2-axis MEMS gyro sensor by frequency matching of driving and sensing motion

Title
Design and fabarication of high sensitivity 2-axis MEMS gyro sensor by frequency matching of driving and sensing motion
Authors
임근배
POSTECH Authors
임근배
Date Issued
1-Jun-2008
Publisher
NSTI-Nanotech 2008
URI
http://oasis.postech.ac.kr/handle/2014.oak/54770
Article Type
Conference
Citation
NSTI-Nanotech 2008, 2008-06-01
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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