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Helicon Wave Plasma CVD 법에 의한 c-BN 박막의 합성 및 밀착력 증대

Title
Helicon Wave Plasma CVD 법에 의한 c-BN 박막의 합성 및 밀착력 증대
Authors
김경보
Date Issued
2000
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905073
http://141.223.5.61//handle/2014.oak/5302
Article Type
Thesis
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