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Etch characteristics of GaAs/AlGaAs heterostructure using bias-ECR etcher

Title
Etch characteristics of GaAs/AlGaAs heterostructure using bias-ECR etcher
Authors
강봉구
POSTECH Authors
강봉구
Date Issued
1-Jan-1989
Publisher
KITE-ICVC
URI
http://oasis.postech.ac.kr/handle/2014.oak/52851
Article Type
Conference
Citation
KITE-ICVC, 1989-01-01
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 KANG, BONG KOO
Dept of Electrical Enginrg
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