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RTCVD 법에 의한 실리콘 에피막의 성장 및 특성

Title
RTCVD 법에 의한 실리콘 에피막의 성장 및 특성
Authors
강봉구
POSTECH Authors
강봉구
Date Issued
1-Jan-1995
Publisher
전자공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/52831
Article Type
Conference
Citation
전자공학회 하계학술대회, 1995-01-01
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 KANG, BONG KOO
Dept of Electrical Enginrg
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