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Direct Liquid Injection (DLI)공정을 이용한 tris(2,2,6,6-tetramethyl-3,5-heptanedionato) ruthenium(III)로부터 RuO₂및 Ru박막의 유기금속 화학증착

Title
Direct Liquid Injection (DLI)공정을 이용한 tris(2,2,6,6-tetramethyl-3,5-heptanedionato) ruthenium(III)로부터 RuO₂및 Ru박막의 유기금속 화학증착
Authors
이동진
Date Issued
2000
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905052
http://141.223.5.61//handle/2014.oak/5281
Article Type
Thesis
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