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(hexafluoroacetylacetonate)Cu(I)(vinylcyclohexane)과 (hexafluoroacetylacetonate)Cu(I)(allylcyclopentane)을 이용한 구 박막의 유기금속 화학증착과 산화공정을 이용한 구리 박막의 건식각

Title
(hexafluoroacetylacetonate)Cu(I)(vinylcyclohexane)과 (hexafluoroacetylacetonate)Cu(I)(allylcyclopentane)을 이용한 구 박막의 유기금속 화학증착과 산화공정을 이용한 구리 박막의 건식각
Authors
강상우
Date Issued
1999
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899644
http://141.223.5.61//handle/2014.oak/4871
Article Type
Thesis
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