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Reliability properties in sub-50 nm high performance high-k.metal gate stacks SiGe pMOSFETs

Title
Reliability properties in sub-50 nm high performance high-k.metal gate stacks SiGe pMOSFETs
Authors
이정수
POSTECH Authors
이정수
Date Issued
12-Oct-2010
Publisher
IEEE
URI
http://oasis.postech.ac.kr/handle/2014.oak/47643
Article Type
Conference
Citation
IEEE Nanotechnology Materials and Devices conference, 2010-10-12
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 LEE, JEONG SOO
Dept of Electrical Enginrg
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