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Quantification of porosity and deposition rate of nano-porous films grown by oblique angle deposition

Title
Quantification of porosity and deposition rate of nano-porous films grown by oblique angle deposition
Authors
김종규David J. PoxsonFrank W. MontMartin F. SchubertE. Fred Schubert
POSTECH Authors
김종규
Date Issued
19-Oct-2008
Publisher
AVS 55th International Symposium & Exhibition
URI
http://oasis.postech.ac.kr/handle/2014.oak/46708
Article Type
Conference
Citation
AVS 55th International Symposium & Exhibition, 2008-10-19
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 KIM, JONG KYU
Dept of Materials Science & Enginrg
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