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Test Structures for Accurate UHF C-V Measurements of Nano-Scale CMOSFETs with HfSiON and TiN Metal Gate

Title
Test Structures for Accurate UHF C-V Measurements of Nano-Scale CMOSFETs with HfSiON and TiN Metal Gate
Authors
정윤하
POSTECH Authors
정윤하
Date Issued
19-Mar-2007
Publisher
IEEE
URI
http://oasis.postech.ac.kr/handle/2014.oak/46312
Article Type
Conference
Citation
IEEE International Conference on Microelectronic Test Structures (ICMTS 2007), page. 124 - 127, 2007-03-19
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 JEONG, YOON HA
Dept of Electrical Enginrg
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