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Tetramethylethylenediamine Alane(TMEDAA)을 이용한 알루미늄 박막의 유기 금속 화학 증착

Title
Tetramethylethylenediamine Alane(TMEDAA)을 이용한 알루미늄 박막의 유기 금속 화학 증착
Authors
김대환
Date Issued
1998
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899281
http://141.223.5.61//handle/2014.oak/4509
Article Type
Thesis
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