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Helical Resonator 고밀도 SF6 플라즈마에 의한 텅스텐 식각 특성

Title
Helical Resonator 고밀도 SF6 플라즈마에 의한 텅스텐 식각 특성
Authors
정지윤
Date Issued
1997
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899101
http://141.223.5.61//handle/2014.oak/4329
Article Type
Thesis
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