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다결정 실리콘-게르마늄 TFT 저온공정개발과 이를 이용한 상abrication of Rapid-Thermal CVD Polycrystalline Silicon-Germanium CMOS TFT

Title
다결정 실리콘-게르마늄 TFT 저온공정개발과 이를 이용한 상abrication of Rapid-Thermal CVD Polycrystalline Silicon-Germanium CMOS TFT
Authors
최성민
Date Issued
1996
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898852
http://141.223.5.61//handle/2014.oak/4081
Article Type
Thesis
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