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CONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING

Title
CONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING
Authors
T. KailathC. SchaperY. ChoP. GyugyiS. NormanP. ParkS. BoydG. FranklinK. SaraswatM.
POSTECH Authors
P. Park
Date Issued
Jan-1996
Publisher
CRC PRESS
URI
http://oasis.postech.ac.kr/handle/2014.oak/40372
Article Type
Article
Citation
THE CONTROL HANDBOOK, page. 1243 - 1259, 1996-01
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 PARK, POOGYEON
Dept of Electrical Enginrg
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