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DIAMOND FILM DEPOSITION BY MICROWAVE PLASMA CVD USING A MIXTURE OF CH4, H2, O2

Title
DIAMOND FILM DEPOSITION BY MICROWAVE PLASMA CVD USING A MIXTURE OF CH4, H2, O2
Authors
제정호
POSTECH Authors
제정호
Date Issued
Jan-1990
Publisher
한국세라믹학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/40125
ISSN
1229-7801
Article Type
Article
Citation
한국세라믹학회지, vol. 27, no. 4, page. 513 - 520, 1990-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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