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Si/M(M=Co, Pd)/GaAs의 계면 반응 분석에 의한 옴성 접촉 형성 contact formation based on the interfacial reaction analysis in Si/M(M=Co, Pd)/GaAs system

Title
Si/M(M=Co, Pd)/GaAs의 계면 반응 분석에 의한 옴성 접촉 형성 contact formation based on the interfacial reaction analysis in Si/M(M=Co, Pd)/GaAs system
Authors
신동원
Date Issued
1996
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898766
http://141.223.5.61//handle/2014.oak/3995
Article Type
Thesis
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