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RF magnetron sputtering 법을 이용한 Si(001)기판 위에 Ag 박막ilms on Si(001) by RF magnetron sputtering

Title
RF magnetron sputtering 법을 이용한 Si(001)기판 위에 Ag 박막ilms on Si(001) by RF magnetron sputtering
Authors
강태수
Date Issued
1996
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898759
http://141.223.5.61//handle/2014.oak/3988
Article Type
Thesis
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