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Helicon Wave Plasma CVD 법에 의해 제조된 c-BN 박막의 안정화helicon wave plasma CVD

Title
Helicon Wave Plasma CVD 법에 의해 제조된 c-BN 박막의 안정화helicon wave plasma CVD
Authors
김경보
Date Issued
1996
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898721
http://141.223.5.61//handle/2014.oak/3950
Article Type
Thesis
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