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DRAM용 RuO2와 Pt 하부 전극의 계면 안정성에 대한 연구

Title
DRAM용 RuO2와 Pt 하부 전극의 계면 안정성에 대한 연구
Authors
김유성
Date Issued
1996
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898707
http://141.223.5.61//handle/2014.oak/3936
Article Type
Thesis
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