Open Access System for Information Sharing

Login Library

 

Article
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Title
System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation
Authors
HYUKJIN, J KWONSEYEONG, SEOKLIM, GEUNBAE
POSTECH Authors
LIM, GEUNBAE
Date Issued
Nov-2017
Publisher
MPDI
Abstract
Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope. In this study, a MEMS vibratory gyroscope is analyzed based on the system dynamic modeling; thus, it can be mathematically expressed and integrated into a circuit simulator. A behavioral simulation of the entire system was conducted to prove the self-oscillation and angular-rate detection and to determine the circuit parameters to be optimized. From the simulation, the operating characteristic according to the vacuum pressure and scale factor was obtained, which indicated similar trends compared with those of the experimental results. The simulation method presented in this paper can be generalized to a wide range of MEMS devices
Keywords
MEMS; gyroscope; simulation; COMSOL; SPICE
URI
http://oasis.postech.ac.kr/handle/2014.oak/38964
DOI
10.3390/s17112663
ISSN
1424-8220
Article Type
Article
Citation
Sensors, vol. 17, no. 11, page. 2663 - 2663, 2017-11
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

 LIM, GEUNBAE
Dept of Mechanical Enginrg
Read more

Altmetric

Views & Downloads

Browse