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Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

Title
Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay
Authors
Gwanho YoonInki KimSunae SoJungho MunMinkyung KimRho, J.
POSTECH Authors
Rho, J.
Date Issued
Dec-2017
Publisher
Nature Publishing Group
URI
http://oasis.postech.ac.kr/handle/2014.oak/38962
DOI
10.1038/S41598-017-06833-5
ISSN
2045-2322
Article Type
Article
Citation
SCIENTIFIC REPORTS, vol. 7, no. 1, page. 1 - 8, 2017-12
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Dept of Mechanical Enginrg
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