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헬리콘 플라즈마 화학 증착법에 의한 c-BN 박막의 합성

Title
헬리콘 플라즈마 화학 증착법에 의한 c-BN 박막의 합성
Authors
김기성.
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898642
http://141.223.5.61//handle/2014.oak/3871
Article Type
Thesis
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