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초고집적회로 제조를 위한 탄탈륨 산화박막의 유기금속화학증착에 관한 연구

Title
초고집적회로 제조를 위한 탄탈륨 산화박막의 유기금속화학증착에 관한 연구
Authors
남갑진
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898588
http://141.223.5.61//handle/2014.oak/3817
Article Type
Thesis
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