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전자빔 리소그래피 기반 3차원 나노구조 및 하이브리드 2차원 나노구조 가공

Title
전자빔 리소그래피 기반 3차원 나노구조 및 하이브리드 2차원 나노구조 가공
Authors
Inki Kim노준석
POSTECH Authors
노준석
Date Issued
Jan-2017
Publisher
대한기계학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/36841
ISSN
1226-7287
Article Type
Article
Citation
기계저널, 57, 1, 32, 36
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 RHO, JUNSUK
Dept of Mechanical Enginrg
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