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RF 스퍼트링으로 성장된 TiN 박막의 표면 거칠기의 X선 반사율 연구

Title
RF 스퍼트링으로 성장된 TiN 박막의 표면 거칠기의 X선 반사율 연구
Authors
윤상배
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898196
http://141.223.5.61//handle/2014.oak/3425
Article Type
Thesis
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