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플라즈마 화학증착법에 의한 SI3N4박막 제조

Title
플라즈마 화학증착법에 의한 SI3N4박막 제조
Authors
제정호오운철
POSTECH Authors
제정호
Date Issued
Jan-1989
Publisher
.
URI
http://oasis.postech.ac.kr/handle/2014.oak/33332
ISSN
1226-4873
Article Type
Article
Citation
연구기보, vol. 3, no. 4, page. 79 - 83, 1989-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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