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DMEAA를 이용한 초고집적 회로용 A1 박막의 유기금속 화학증착법

Title
DMEAA를 이용한 초고집적 회로용 A1 박막의 유기금속 화학증착법
Authors
이기호
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898104
http://141.223.5.61//handle/2014.oak/3333
Article Type
Thesis
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