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플라즈마 화학증착공정에 의한 박막제조 기술

Title
플라즈마 화학증착공정에 의한 박막제조 기술
Authors
제정호
POSTECH Authors
제정호
Date Issued
Jan-1989
Publisher
대한금속재료학회(구 대한금속학회)
URI
http://oasis.postech.ac.kr/handle/2014.oak/33322
ISSN
1225-1550
Article Type
Article
Citation
대한금속학회 회보, vol. 2, no. 1, page. 9 - 19, 1989-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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