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RTCVD 법으로 성장한 실리콘 에피막의 특성

Title
RTCVD 법으로 성장한 실리콘 에피막의 특성
Authors
정욱진권영규배영호김광일강봉구손병기
POSTECH Authors
강봉구
Date Issued
Jan-1996
Publisher
한국센서학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/30559
ISSN
1225-5475
Article Type
Article
Citation
센서학회지, vol. 5, no. 1, page. 63 - 70, 1996-01
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 KANG, BONG KOO
Dept of Electrical Enginrg
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