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POLY SI1-XGEX 박막의 산화 거동 연구

Title
POLY SI1-XGEX 박막의 산화 거동 연구
Authors
강성관고대홍오상호박찬경이기청양두영안태항주문식
POSTECH Authors
박찬경
Date Issued
Jan-2000
Publisher
한국진공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/30266
ISSN
1225-8822
Article Type
Article
Citation
한국진공학회지, vol. 9, no. 4, page. 346 - 352, 2000-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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