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In-situ doping during ZnO atomic layer deposition

Title
In-situ doping during ZnO atomic layer deposition
Authors
Lim, SJSung Kyun LeeMinho JoChang-Soo LeeKwon, SHyungjun Kim
POSTECH Authors
Kwon, S
Date Issued
Jan-2008
Publisher
KOREAN PHYSICAL SOC
Keywords
transparent conducting oxides; atomic layer deposition; Al-doped ZnO films; TRANSPARENT CONDUCTING OXIDES; PULSED-LASER DEPOSITION; THIN-FILMS; AL FILMS
URI
http://oasis.postech.ac.kr/handle/2014.oak/30108
ISSN
0374-4884
Article Type
Article
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 53, no. 1, page. 253 - 257, 2008-01
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 KWON, SOON JU
Dept of Materials Science & Enginrg
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