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스퍼터링에 의해 증착된 TiN 박막의 우선 방위

Title
스퍼터링에 의해 증착된 TiN 박막의 우선 방위
Authors
오운철
Date Issued
1993
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897707
http://141.223.5.61//handle/2014.oak/2937
Article Type
Thesis
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