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STUDIES OF THE GAS-PHASE REACTIVE INTERMEDIATES FORMED BY HETEROGENEOUS PROCESSES IN CHLOROSILANE CHEMICAL VAPOR-DEPOSITION USING PHOTOELECTRON-SPECTROSCOPY AND MASS-SPECTROMETRY

Title
STUDIES OF THE GAS-PHASE REACTIVE INTERMEDIATES FORMED BY HETEROGENEOUS PROCESSES IN CHLOROSILANE CHEMICAL VAPOR-DEPOSITION USING PHOTOELECTRON-SPECTROSCOPY AND MASS-SPECTROMETRY
Authors
신승구
Date Issued
Jan-1990
Publisher
AMER CHEMICAL SOC
URI
http://oasis.postech.ac.kr/handle/2014.oak/29078
ISSN
0022-3654
Article Type
ARTICLE
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