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STUDIES OF THE GAS-PHASE REACTIVE INTERMEDIATES FORMED BY HETEROGENEOUS PROCESSES IN CHLOROSILANE CHEMICAL VAPOR-DEPOSITION USING PHOTOELECTRON-SPECTROSCOPY AND MASS-SPECTROMETRY

Title
STUDIES OF THE GAS-PHASE REACTIVE INTERMEDIATES FORMED BY HETEROGENEOUS PROCESSES IN CHLOROSILANE CHEMICAL VAPOR-DEPOSITION USING PHOTOELECTRON-SPECTROSCOPY AND MASS-SPECTROMETRY
Authors
G. H. KruppaS. K. ShinJ. L. Beauchamp
POSTECH Authors
S. K. Shin
Date Issued
Jan-1990
Publisher
AMER CHEMICAL SOC
URI
http://oasis.postech.ac.kr/handle/2014.oak/29078
Article Type
Article
Citation
JOURNAL OF PHYSICAL CHEMISTRY, vol. 94, no. 1, page. 327 - 331, 1990-01
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 SHIN, SEUNG KOO
Dept of Chemistry
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