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SOFT-CONTACT OPTICAL LITHOGRAPHY USING TRANSPARENT ELASTOMERIC STAMPS: APPLICATION TO NANOPATTERNED ORGANIC LIGHT-EMITTING DEVICES

Title
SOFT-CONTACT OPTICAL LITHOGRAPHY USING TRANSPARENT ELASTOMERIC STAMPS: APPLICATION TO NANOPATTERNED ORGANIC LIGHT-EMITTING DEVICES
Authors
Lee, TWJeon, SMaria, JZaumseil, JHsu, JWPRogers, JA
POSTECH Authors
Lee, TW
Date Issued
Sep-2005
Publisher
WILEY-V C H VERLAG GMBH
Keywords
NEAR-FIELD; PHASE MASK; PHOTOLITHOGRAPHY; CHEMISTRIES; LAMINATION
URI
http://oasis.postech.ac.kr/handle/2014.oak/28871
DOI
10.1002//ADFM.200500
ISSN
1616-301X
Article Type
Article
Citation
ADVANCED FUNCTIONAL MATERIALS, vol. 15, no. 9, page. 1435 - 1439, 2005-09
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 LEE, TAE WOO
Dept of Materials Science & Enginrg
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