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REMOVING 20 NM CERAMIC PARTICLES USING A SUPERSONIC PARTICLE BEAM FROM A CONTOURED LAVAL NOZZLE

Title
REMOVING 20 NM CERAMIC PARTICLES USING A SUPERSONIC PARTICLE BEAM FROM A CONTOURED LAVAL NOZZLE
Authors
Hwang, KSLee, MJYi, MYLee, JW
POSTECH Authors
Lee, JW
Date Issued
May-2009
Publisher
ELSEVIER SCIENCE SA
Keywords
Nano particle cleaning; Cryogenic; Supersonic nozzle
URI
http://oasis.postech.ac.kr/handle/2014.oak/28797
DOI
10.1016/J.TSF.2009.0
ISSN
0040-6090
Article Type
Article
Citation
THIN SOLID FILMS, 517, 14, 3866, 3869
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 LEE, JIN WON
Dept of Mechanical Enginrg
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