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Au catalyzed structural and electrical evolution of Ni/Au contact to GaN

Title
Au catalyzed structural and electrical evolution of Ni/Au contact to GaN
Authors
Kim, CCKim, JKLee, JLJe, JHYi, MSNoh, DYHwu, YRuterana, P김종규
Date Issued
Nov-2001
Publisher
WILEY-V C H VERLAG GMBH
Abstract
We investigated the micro-structural and electrical behavior of Ni/Au contacts on GaN(0001) during annealing in N-2 and in air. The formation of a Ni4N phase deteriorates the contact resistivity if annealed in N2. Annealing in air, however, dramatically improves it. The oxidation, by creating, them more energy favorable Ni-O bonds, seems to be the recipe to successfully suppress the formation of Ni4N which otherwise would be enhanced significantly by the presence of Au as a catalyst.
Keywords
P-TYPE GAN; FIELD-EFFECT TRANSISTORS; DIODES
URI
http://oasis.postech.ac.kr/handle/2014.oak/28162
ISSN
0031-8965
Article Type
PROCEEDINGS PAPER
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