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Cited 9 time in webofscience Cited 13 time in scopus
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A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs

Title
A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs
Authors
Kim, BIJeong, SShin, JKoo, JChae, JLee, S
POSTECH Authors
Kim, BI
Date Issued
May-2009
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Keywords
Automated material handling system; AutoMod; generic simulation model; layout; WAFER-FAB; SYSTEMS; OPTIMIZATION; DESIGN; AMHS; TOOL
URI
http://oasis.postech.ac.kr/handle/2014.oak/26554
DOI
10.1109/TSM.2009.2017624
ISSN
0894-6507
Article Type
Article
Citation
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, vol. 22, no. 2, page. 225 - 231, 2009-05
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 KIM, BYUNG IN
Dept of Industrial & Management Enginrg
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