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Ti중간층이 플라즈마 화학증착법에 의한 TiN 박막의 밀착력에 미치는 영향

Title
Ti중간층이 플라즈마 화학증착법에 의한 TiN 박막의 밀착력에 미치는 영향
Authors
우치구
Date Issued
1992
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897422
http://141.223.5.61//handle/2014.oak/2652
Article Type
Thesis
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