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Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition

Title
Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
Authors
Lee, HBRGu, GHSon, JYPark, CGKim, H
POSTECH Authors
Park, CGKim, H
Date Issued
Jan-2008
Publisher
WILEY-V C H VERLAG GMBH
Abstract
A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm. the magnetic anisotropy of Co NRs caused by shape anisotropy.
Keywords
atomic layer deposition; cobalt; magnetic materials; nanorods; nickel; CHEMICAL-VAPOR-DEPOSITION; NANOWIRE ARRAYS; GROWTH; FABRICATION; COBALT; SURFACE; FILMS; NANOSTRUCTURES; SENSORS; WIRES
URI
http://oasis.postech.ac.kr/handle/2014.oak/26497
DOI
10.1002/SMLL.200801074
ISSN
1613-6810
Article Type
Article
Citation
SMALL, vol. 4, no. 12, page. 2247 - 2254, 2008-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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