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A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing

Title
A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing
Authors
Choi, SLee, HMoon, W
POSTECH Authors
Moon, W
Date Issued
Jan-2010
Publisher
Elsevier
Keywords
MEMS hydrophone; Piezoelectric sensor; Thin plate; Air backing; MODEL; SENSITIVITY; PRESSURE; PLATE
URI
http://oasis.postech.ac.kr/handle/2014.oak/25972
ISSN
0924-4247
Article Type
Article
Citation
SENSORS AND ACTUATORS A-PHYSICAL, vol. 158, no. 1, page. 60 - 71, 2010-01
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 MOON, WON KYU
Dept of Mechanical Enginrg
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