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Cited 17 time in webofscience Cited 19 time in scopus
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Sub-micron metallic electrothermal actuators

Title
Sub-micron metallic electrothermal actuators
Authors
Lee, JSPark, DSWNallani, AKLee, GSLee, JB
POSTECH Authors
Lee, JS
Date Issued
Feb-2005
Publisher
IOP PUBLISHING LTD
Keywords
FABRICATION
URI
http://oasis.postech.ac.kr/handle/2014.oak/25891
DOI
10.1088/0960-1317/15/2/011
ISSN
0960-1317
Article Type
Article
Citation
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 15, no. 2, page. 322 - 327, 2005-02
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 LEE, JEONG SOO
Dept of Electrical Enginrg
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