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A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity

Title
A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity
Authors
Lee, HChoi, SMoon, W
POSTECH Authors
Moon, W
Date Issued
Sep-2010
Publisher
ACOUSTICAL SOC AMER AMER INST PHYSICS
Keywords
THIN-FILM; SILICON; TRANSDUCERS; PRESSURE
URI
http://oasis.postech.ac.kr/handle/2014.oak/25672
DOI
10.1121/1.3467757
ISSN
0001-4966
Article Type
Article
Citation
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, vol. 128, no. 3, page. 1033 - 1044, 2010-09
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 MOON, WON KYU
Dept of Mechanical Enginrg
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