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Fabrication of 3-Dimensional Structure of Metal Oxide Semiconductor Field Effect Transistor Embodied in the Convex Corner of the Silicon Micro-Fluidic Channel

Title
Fabrication of 3-Dimensional Structure of Metal Oxide Semiconductor Field Effect Transistor Embodied in the Convex Corner of the Silicon Micro-Fluidic Channel
Authors
Lim, GPark, CSLyu, HKKim, DSJeong, YTPark, HJKim, HSShin, JKChoi, PLee, JH
POSTECH Authors
Lim, G
Date Issued
Jun-2003
Publisher
JAPAN SOC APPLIED PHYSICS
Keywords
3-dimensional structure; convex corner; micro-fluidic channel; 3-D MOSFET
URI
http://oasis.postech.ac.kr/handle/2014.oak/25223
DOI
10.1143/JJAP.42.4089
ISSN
0021-4922
Article Type
Article
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, 42, 6B, 4089, 4092
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 LIM, GEUNBAE
Dept of Mechanical Enginrg
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