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Two-dimensional fluid simulation of large-area plasma source with parallel resonance antenna

Title
Two-dimensional fluid simulation of large-area plasma source with parallel resonance antenna
Authors
Choi, SMLee, SLee, JKim, KYeom, G
Date Issued
Jan-2007
Publisher
ELSEVIER SCIENCE BV
URI
http://oasis.postech.ac.kr/handle/2014.oak/23277
DOI
10.1016/J.EPC.2007.0
ISSN
0010-4655
Article Type
Article
Citation
COMPUTER PHYSICS COMMUNICATIONS, 177, 39815, 126, 126
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