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EFFECTS OF SULFIDE TREATMENT ON INP METAL-INSULATOR-SEMICONDUCTOR DEVICES WITH PHOTOCHEMICAL VAPOR DEPOSIT P3N5 GATE INSULATORS

Title
EFFECTS OF SULFIDE TREATMENT ON INP METAL-INSULATOR-SEMICONDUCTOR DEVICES WITH PHOTOCHEMICAL VAPOR DEPOSIT P3N5 GATE INSULATORS
Authors
JEONG, YHLEE, BHJO, SKJEONG, MYSUGANO, T
POSTECH Authors
JEONG, YH
Date Issued
Oct-1995
Publisher
JAPAN J APPLIED PHYSICS
Keywords
SULFIDE TREATMENT; PHOTO-CVD; DEPLETION MODE INP MISFET; POWER DEVICE; ELECTRICAL CHARACTERISTICS; NITRIDE; PASSIVATION; INTERFACE; SURFACES; SULFUR
URI
http://oasis.postech.ac.kr/handle/2014.oak/21704
ISSN
0021-4922
Article Type
Article
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, vol. 34, no. 10B, 1995-10
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 JEONG, YOON HA
Dept of Electrical Enginrg
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