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Effects of sulfide treatment on the gate voltage swing of InP MISFETs with photo-CVD grown P3N5 gate insulator

Title
Effects of sulfide treatment on the gate voltage swing of InP MISFETs with photo-CVD grown P3N5 gate insulator
Authors
Jo, SKLee, BHJeong, MYJeong, YHSugano, T
POSTECH Authors
Jeong, YH
Date Issued
Jan-1996
Publisher
IOP PUBLISHING LTD
Keywords
SURFACES; SULFUR
URI
http://oasis.postech.ac.kr/handle/2014.oak/21661
ISSN
0951-3248
Article Type
Article
Citation
INSTITUTE OF PHYSICS CONFERENCE SERIES, vol. 145, page. 775 - 778, 1996-01
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 JEONG, YOON HA
Dept of Electrical Enginrg
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